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Linex : New Inline Wet Process Equipment for Cleaning, Etching and Polishing by Singulus Technologies.

Singulus Technologies provides complete inline automated dry-in/dry-out solutions for wet treatment of Si-wafers in standard, high-efficiency cell lines. Singulus Technologies is introducing Linex, the new inline wet process equipment for cleaning, alkaline & acidic etching, single side treatment, polish etch & PSG removal and inline ozone applications. This new Linex wet processing technology will be presented at SNEC 2017 in Shanghai, China from April 19 – 21, 2017.


The new Linex system is an inline wet processing platform for horizontal substrate transport of solar wafers. The Singulus Technologies Linex combines an advanced transportation system and sustainable/innovative processing modules with proven and efficient chemical treatment. In addition to proven processes, the focus is on new applications such as polish etching, emitter etching and ozone-based treatments. The highly integrated design, high throughput, high availability and low breakage rate make LINEX very attractive for solar cell manufacturers worldwide. The modular design offers inline systems for R&D purposes as well as mass production systems with fully integrated 5 lane or 10 lane concepts for capacities of 4000 wph and 8000 wph.

The Linex inline system provides a wide range of process options. With respect to the highest flexibility in configuration, the new Linex generation is characterized by clear modular design and compact footprint. The Linex concept fulfils current and future requirements with regard to capacity, flexibility and stability for mass production.